Condition Monitoring for Semiconductor Factories Sub Fab Level

In the sub fab, vacuum pumps, electrical boxes, fans, air handlers, heat exchangers, chillers, and other equipment that supports semiconductor fabrication must operate at peak efficiency to maximize productivity in the rest of the fab. Any variations in performance can cause unplanned downtime or introduce errors into the manufacturing process. Using Banner’s QM30VT Series of vibration and temperature sensors and a DXMR90 Series Industrial Controller, operators can monitor sub fab machine health and status from virtually anywhere so they can quickly address issues before any major failure occurs.  

Early identification of potential problems requires detecting even the slightest changes in machine vibration and temperature. Operators can get actionable data on the health and performance of their equipment with wireless QM30VT sensors designed to deliver exceptional levels of accuracy in measuring RMS velocity and temperature. These sensors can be mounted all across the sub fab on motors, fans, pumps, or any other machinery with rotating motion or vibration, and send data to a DXMR90 Series Industrial Controller. The DXMR90 consolidates and processes data from all connected sensors in the sub fab, then sends it to either a local PLC, HMI, or SCADA system. Working together, the QM30VT Series sensors and DXMR90 Series Industrial Controllers help ensure the reliability and efficiency of the sub fab systems and, by extension, the entire semiconductor production process.